Microfluidics Testing & Fabrication System

Tabletop Micro Pattern Generator

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Brand/Model
Heidelberg Instruments µPG101
Applications

To produce photomasks for direct exposures of wafers and/or other substrates. Performing various applications such as MEMS, BIOMEMS, Micro Optics, ASICs, Micro Fluidics, Sensors, CGHs, and all other applications that require microstructures fabrication.

Type of Samples
Wafer
Country of Origin
N/A
Specifications
  1. Use micro pattern generator for direct writing applications and low volume mask making
  2. Real-time autofocus system monitors and correct focus position during exposure area

Microfluidics Surface Profiler

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Brand/Model
KLA, TENCOR ALPHA-STEP-D 600
Applications
Used to determine film thickness, channel depth of microfluidic devices, and roughness of treated surfaces
Type of Samples
Microfluidic sample
Country of Origin
N/A
Specifications
  1. Surface measurement system has 150mm scan length standard
  2. Materials characterization for surface roughness and waviness

Computerized Cutting Printer

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Brand/Model
GRAPHTEC CE6000-60
Applications
For rapid micro-chips fabrication
Type of Samples
Micro-chips
Country of Origin
N/A
Specifications
  1. Contour cut pre-printed graphics.
  2. Tangential emulation.

Planetary Centrifugal Mixer

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Brand/Model
THINKY / ARE-310
Applications
For degassing and mixing viscous polymers
Type of Samples
Polymer sample
Country of Origin
N/A
Specifications
  1. Supports a wide range of materials, including high-viscosity materials and nanofilters.
  2. 2 modes of mixing and deaeration achieve dispersion and deaeration of high-viscosity materials in a small amount of time.

Desiccator

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Brand/Model
KARTELL
Applications
Used to store dried samples in a dry atmosphere.
Type of Samples
Microfluidic sample
Country of Origin
N/A
Specifications
  1. Holds a vacuum of 740mm for 24 hours.
  2. Vacuum retention valve allows air to enter slowly.
  3. Fits plate diameter 141mm.

Plasma Cleaner/Etcher (Fully Automated)

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Brand/Model
HARRICK PLASMA / PDC-002
Applications
Allow to do the principal interaction with a surface: ablation, chemical etching, activation, deposition and cross-linking. (For PDMS bonding in microfluidics fabrication)
Type of Samples
Microfluidic sample
Country of Origin
N/A
Specifications
Inductively coupled plasma, valve assembly to control gas flow, active fan cooling, extensively used for nanoscale surface cleaning and surface activation.

Vacuum Oven

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Brand/Model
THERMO SCIENTIFIC / VT 6025
Applications
To remove substances from samples without overheating (for PDMS reticulation).
Type of Samples
Microfluidic sample
Country of Origin
N/A
Specifications
  1. Feature independent vacuum and purge needle valves.
  2. Radiant warm-wall heating system optimizes uniformity and conserves chamber space for drying, curing, vacuum embedding and plating applications.

Programmable UV Lamp Unit

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Brand/Model
BLACKHOLE LAB SOFTLITHOBOX UV/KUB
Applications
For microfluidics fabrication
Type of Samples
Microfluidic sample
Country of Origin
N/A
Specifications
  1. UV-LEDs emitting at 365nm in standard configuration.
  2. Dimensions: 260 x 260 x 260mm3.

Programmable Spin Coater

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Brand/Model
BLACKHOLE LAB SOFTLITHOBOX UV/KUB
Applications
For microfluidics fabrication
Type of Samples
Microfluidic sample
Country of Origin
N/A
Specifications
  1. UV-LEDs emitting at 365nm in standard configuration.
  2. Dimensions: 260 x 260 x 260mm3.

Programmable Spin Coater (Photo Resist)

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Brand/Model
SPS SPIN150i-NPP
Applications
To deposit layers of photoresist
Type of Samples
Wafer
Country of Origin
N/A
Specifications
High resist film thickness homogeneity as well as the short coating times

Programmable Hot Plate

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Brand/Model
BLACKHOLE LAB TORREY PINES SCIENTIFIC / HP30A-2
Applications

Ensure accurate, homogeneous and stable temperature set points. This digital    hotplate device enables to set temperature ramp for heating and cooling down

Type of Samples
Wafer
Country of Origin
N/A
Specifications
Simple digital hot plates and stirring hot plates can control and display plate temperature, solution temperature, stirring speed and time

Silent Compressor & Air Gun

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Brand/Model
JUN-AIR/MODEL 3 COMPRESSOR
Applications

To supply minimum air flow and pressure to spin coater or air gun

Type of Samples
Wafer
Country of Origin
N/A
Specifications
  1. Quiet compressor with a noise level below 45 dB (A)
  2. Tolerance between piston and the cylinder has been reduced, minimizing the heat development and the energy loss